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Experimental Study on Nanoscale Heat Transport by Femtosecond Laser (pp. 251-280) $100.00
Authors:  (Jie Zhu, Zhaoliang Wang and Dawei Tang, Institute of Engineering Thermophysics, Chinese Academy of Sciences, Beijing, China)
Abstract:
As laser technology has advanced, laser pulses have shortened to tens of
femtoseconds. Ultrashort pulses allow for the interrogation of physical systems with high
temporal resolution, and this also can translate into correspondingly high spatial
resolution. This makes an opportunity on the measurement of thermal properties of nanoscale
thin films and material interfaces, which play an important role in many
technologies such as microelectronics and solid-state energy conversion. The most
common way such measurements are done is known as the pump-probe
thermoreflectance technique. This chapter emphasizes recent developments in
experimental study on thermal properties of different kinds of nano-scale thin films and
interfaces by the ultrafast thermoreflectance techniques. A heat transfer model for
multilayer structure is introduced to calculate the thermoreflectance response of the
sample surface temperature change in the real space, which is suitable for both timedomain
thermoreflectance (TDTR) and frequency-domain thermoreflectance (FDTR)
measurement methods. An analysis of the sensitivity of TDTR signals to the thermal
properties of thin films is given to show the dilemma on appropriate modulation
frequency selection; however the FDTR technique can avoid the above mentioned critical
challenges. The sensitivity of FDTR signals to the thermal properties of thin films is
analyzed with different thicknesses, which articulates the advantages of FDTR method
compared to TDTR method. Then, we describe a technique for simultaneous
measurement of thermal conductivity and volumetric heat capacity of both bulk and thin
film materials using frequency-dependent TDTR signals, and with this method,
simultaneous measurements of thermal conductivity and volumetric heat capacity of bulk
Si and thin film SiO2 samples are demonstrated. Some typical measurement results on
nano-thin films and interfaces are also demonstrated. At last, an extended application of this laser pulse pump and probe thermoreflectance method for micro-thermography is
presented. 


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Experimental Study on Nanoscale Heat Transport by Femtosecond Laser (pp. 251-280)