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Novel Quartz Oscillator Measurement for Gas Composition Changes (pp. 193-212) $100.00
Authors:  (Atsushi Suzuki, Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central, Umezono Tsukuba, Japan)
This chapter reviews quartz oscillator measurement to measure gas composition
changes, including hydrogen sensing, hydrogen concentration measurement, humidity
measurement, and partial pressure measurement of air-helium, silane-hydrogen, and
nitrogen-hydrogen gas mixtures. This measurement is based on the output from the
quartz oscillator circuit depending on pressure, viscosity, and molecular weight of the
measured gas. This method can be used to detect the changes in viscosity and molecular
weight of the measured gas, and can thereby detect hydrogen leakage into air. The partial
pressure of each gas in binary gas mixtures can be determined because the viscosity and
molecular weight of the binary gas mixtures depend on the partial pressure ratio of each
gas. By measuring using quartz oscillator, viscosity and molecular weight of binary gas
mixtures can be obtained, thereby, each partial pressure in binary gas mixtures are also
derived from the ratio. The principle of this method, experimental apparatus, and results
are summarized.
The quartz oscillator measurement on hydrogen showed 0.1% minimum detectable
hydrogen concentration, under 1 s response time, and measurable concentration up to 100
vol.%. This rapid response is because this quartz oscillator measurement is a physical
measurement, and is therefore essential for other measurements using a quartz oscillator.
Relative humidity and helium concentration in air-helium gas mixtures were measured
for comparison to hydrogen leakage detection into air, and the results showed that the
influence of relative humidity and helium are about 1/50 and 1/4 below 20% helium in
air, respectively. Working curves to derive each concentration of silane and hydrogen in
silane-hydrogen and nitrogen and hydrogen in nitrogen-hydrogen gas mixtures used for
production methods for thin silicon film solar cell materials and nitriding materials were
obtained, which can be used to optimize process conditions. 

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Novel Quartz Oscillator Measurement for Gas Composition Changes (pp. 193-212)