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Advanced Control Design of MEMS Vibratory Gyroscope
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Authors: Juntao Fei (Hohai University, Changzhou, P.R. China) 
Book Description:
MEMS (Micro Electro Mechanical Systems) technologies were developed by applying semiconductor microfabrication technologies to make three-dimensional microstructures and mechanical systems. MEMS technologies offer the advantages of batch fabrication of numbers of devices as well as an ability to integrate multiple functional units in a small area, which is important for developing smart and sophisticated devices. Gyroscopes are commonly used sensors for measuring angular velocity in many areas of applications such as navigation, homing, and control stabilization. Fabrication imperfections and thermal, mechanical noise may hinder the measurement of angular velocity of MEMS gyroscope. This book presents a comprehensive treatment of the analysis and advanced control design of MEMS gyroscope for the problem of angular velocity measurement and minimization of the cross coupling between two axes. (Imprint: Nova)

Table of Contents:
Preface

Chapter 1. Introduction to MEMS Gyroscope pp.1-10

Chapter 2. Dynamics of MEMS Gyroscope pp.11-26

Chapter 3. System Identification of MEMS Gyroscope pp.27-34

Chapter 4. Adaptive Control of MEMS Gyroscope pp.35-42

Chapter 5. Robust Adaptive Control of MEMS Gyroscope pp.43-58

Chapter 6. Adaptive Sliding Mode Control of MEMS Gyroscope pp.59-80

Chapter 7. Robust Adaptive Sliding Mode Control of MEMS Gyroscope pp.81-94

Chapter 8. Adaptive Sliding Mode Control and Observer of MEMS Gyroscope pp.95-112

Chapter 9. Comparative Study of Adaptive Vibration Control for MEMS Gyroscope pp.113-130

Chapter 10. Robust Adaptive Sliding Mode Control of MEMS Triaxial Gyroscope pp.131-146

Chapter 11. Neural Network Based Adaptive Sliding Mode Control of MEMS Gyroscope pp.147-162

Chapter 12. Conclusions pp.163-168

Reference pp.169-176

Index pp.177-180

   Series:
      Nanotechnology Science and Technology
      Electrical Engineering Developments
   Binding: Hardcover
   Pub. Date: 2011
   Pages: 180.pp
   ISBN: 978-1-61470-487-4
   Status: AV
  
Status Code Description
AN Announcing
FM Formatting
PP Page Proofs
FP Final Production
EP Editorial Production
PR At Prepress
AP At Press
AV Available
  
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Advanced Control Design of MEMS Vibratory Gyroscope